Grace Jing Chen

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Selective marking of a substrate with fluorescent conjugated polyme...
- Patent number 12,140,550
- Issue date Nov 12, 2024
- KLA Corporation
- Jinsang Kim
- G01 - MEASURING TESTING
Information Patent Grant
Material recovery systems for optical components
- Patent number 11,715,622
- Issue date Aug 1, 2023
- KLA Corporation
- Gildardo Delgado
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multimode defect classification in semiconductor inspection
- Patent number 11,668,655
- Issue date Jun 6, 2023
- KLA Corporation
- Vaibhav Gaind
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection and review using transmissive current image of ch...
- Patent number 11,410,830
- Issue date Aug 9, 2022
- KLA Corporation
- Hong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field curvature correction for multi-beam inspection systems
- Patent number 11,302,511
- Issue date Apr 12, 2022
- KLA Corporation
- Alan Brodie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer inspection using difference images
- Patent number 11,270,430
- Issue date Mar 8, 2022
- KLA-Tencor Corporation
- Abdurrahman Sezginer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for charged particle microscopy with improved ima...
- Patent number 11,120,969
- Issue date Sep 14, 2021
- KLA Corporation
- Doug K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Correlating SEM and optical images for wafer noise nuisance identif...
- Patent number 10,921,262
- Issue date Feb 16, 2021
- KLA-Tencor Corporation
- Qiang Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Correlating SEM and optical images for wafer noise nuisance identif...
- Patent number 10,697,900
- Issue date Jun 30, 2020
- KLA-Tencor Corporation
- Qiang Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Generating high resolution images from low resolution images for se...
- Patent number 10,648,924
- Issue date May 12, 2020
- KLA-Tencor Corp.
- Jing Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for charged particle microscopy with improved ima...
- Patent number 10,643,819
- Issue date May 5, 2020
- KLA-Tencor Corporation
- Doug K. Masnaghetti
- G01 - MEASURING TESTING
Information Patent Grant
Ultra-high sensitivity hybrid inspection with full wafer coverage c...
- Patent number 10,545,099
- Issue date Jan 28, 2020
- KLA-Tencor Corporation
- Grace Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system including parallel imaging paths with multiple an...
- Patent number 10,429,319
- Issue date Oct 1, 2019
- KLA-Tencor Corporation
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for defect detection using image reconstruction
- Patent number 10,416,087
- Issue date Sep 17, 2019
- KLA-Tencor Corporation
- Jing Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Determining a configuration for an optical element positioned in a...
- Patent number 10,215,713
- Issue date Feb 26, 2019
- KLA-Tencor Corp.
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for finding a best aperture and mode to enhan...
- Patent number 10,132,760
- Issue date Nov 20, 2018
- KLA-Tencor Corporation
- Pavel Kolchin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Generating simulated output for a specimen
- Patent number 10,043,261
- Issue date Aug 7, 2018
- KLA-Tencor Corp.
- Kris Bhaskar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Hybrid inspectors
- Patent number 9,916,965
- Issue date Mar 13, 2018
- KLA-Tencor Corp.
- Kris Bhaskar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detecting defects on a wafer using defect-specific and multi-channe...
- Patent number 9,846,930
- Issue date Dec 19, 2017
- KLA-Tencor Corp.
- Kenong Wu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer inspection with focus volumetric method
- Patent number 9,816,940
- Issue date Nov 14, 2017
- KLA-Tencor Corporation
- Grace H. Chen
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for finding a best aperture and mode to enhan...
- Patent number 9,726,617
- Issue date Aug 8, 2017
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Grant
Determining a configuration for an optical element positioned in a...
- Patent number 9,709,510
- Issue date Jul 18, 2017
- KLA-Tencor Corp.
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Grant
System and method for reducing dynamic range in images of patterned...
- Patent number 9,703,207
- Issue date Jul 11, 2017
- KLA-Tencor Corporation
- Daniel L. Cavan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for apodization in a semiconductor device inspect...
- Patent number 9,645,093
- Issue date May 9, 2017
- KLA-Tencor Corporation
- Jamie M. Sullivan
- G02 - OPTICS
Information Patent Grant
Detecting defects on a wafer using defect-specific and multi-channe...
- Patent number 9,552,636
- Issue date Jan 24, 2017
- KLA-Tencor Corp.
- Kenong Wu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer and reticle inspection systems and methods for selecting illu...
- Patent number 9,523,646
- Issue date Dec 20, 2016
- KLA-Tencor Corporation
- Grace H. Chen
- G01 - MEASURING TESTING
Information Patent Grant
Scratch filter for wafer inspection
- Patent number 9,442,077
- Issue date Sep 13, 2016
- KLA-Tencor Corp.
- Junqing Huang
- G01 - MEASURING TESTING
Information Patent Grant
Enhanced high-speed logarithmic photo-detector for spot scanning sy...
- Patent number 9,389,166
- Issue date Jul 12, 2016
- KLA-Tencor Corporation
- Ralph C. Wolf
- G01 - MEASURING TESTING
Information Patent Grant
Wafer and reticle inspection systems and methods for selecting illu...
- Patent number 9,347,891
- Issue date May 24, 2016
- KLA-Tencor Corporation
- Grace H. Chen
- G01 - MEASURING TESTING
Information Patent Grant
Securing virtual machines with optimized anti-virus scan
- Patent number 9,268,689
- Issue date Feb 23, 2016
- Symantec Corporation
- Grace Jing Chen
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR REDUCING SAMPLE NOISE USING SELECTIVE MARKERS
- Publication number 20230408422
- Publication date Dec 21, 2023
- KLA Corporation
- Grace Hsiu-Ling Chen
- G01 - MEASURING TESTING
Information Patent Application
MULTI-ELEMENT SUPER RESOLUTION OPTICAL INSPECTION SYSTEM
- Publication number 20230296517
- Publication date Sep 21, 2023
- KLA Corporation
- Grace Hsiu-Ling Chen
- G01 - MEASURING TESTING
Information Patent Application
SELECTIVE MARKING OF A SUBSTRATE WITH FLUORESCENT PROBES HAVING A S...
- Publication number 20230236134
- Publication date Jul 27, 2023
- KLA Corporation
- Jinsang Kim
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR FEATURE SIGNAL ENHANCEMENT USING A SELECTIVEL...
- Publication number 20230062418
- Publication date Mar 2, 2023
- KLA Corporation
- Grace Hsiu-Ling Chen
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR OPTICAL WAFER CHARACTERIZATION WITH IMAGE UP...
- Publication number 20220383470
- Publication date Dec 1, 2022
- Abdurrahman Sezginer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROTECTION OF OPTICAL MATERIALS OF OPTICAL COMPONENTS FROM RADIATIO...
- Publication number 20220066071
- Publication date Mar 3, 2022
- KLA Corporation
- Evgeniia Butaeva
- C01 - INORGANIC CHEMISTRY
Information Patent Application
FLUORINE-DOPED OPTICAL MATERIALS FOR OPTICAL COMPONENTS
- Publication number 20220049345
- Publication date Feb 17, 2022
- KLA Corporation
- Gildardo Delgado
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MATERIAL RECOVERY SYSTEMS FOR OPTICAL COMPONENTS
- Publication number 20220044905
- Publication date Feb 10, 2022
- KLA Corporation
- Gildardo Delgado
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORRELATING SEM AND OPTICAL IMAGES FOR WAFER NOISE NUISANCE IDENTIF...
- Publication number 20200292468
- Publication date Sep 17, 2020
- KLA-Tencor Corporation
- Qiang Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and System for Charged Particle Microscopy with Improved Ima...
- Publication number 20200227232
- Publication date Jul 16, 2020
- KLA-Tencor Corporation
- Doug K. Masnaghetti
- G01 - MEASURING TESTING
Information Patent Application
Multimode Defect Classification in Semiconductor Inspection
- Publication number 20200025689
- Publication date Jan 23, 2020
- KLA-Tencor Corporation
- Vaibhav Gaind
- G01 - MEASURING TESTING
Information Patent Application
CORRELATING SEM AND OPTICAL IMAGES FOR WAFER NOISE NUISANCE IDENTIF...
- Publication number 20190383753
- Publication date Dec 19, 2019
- KLA-Tencor Corporation
- Qiang Zhang
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION USING DIFFERENCE IMAGES
- Publication number 20180342051
- Publication date Nov 29, 2018
- KLA-Tencor Corporation
- Abdurrahman Sezginer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHODS FOR FINDING A BEST APERTURE AND MODE TO ENHAN...
- Publication number 20170307545
- Publication date Oct 26, 2017
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Application
Determining a Configuration for an Optical Element Positioned in a...
- Publication number 20170292918
- Publication date Oct 12, 2017
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Application
Field Curvature Correction for Multi-Beam Inspection Systems
- Publication number 20170229279
- Publication date Aug 10, 2017
- KLA-Tencor Corporation
- Alan Brodie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GENERATING SIMULATED OUTPUT FOR A SPECIMEN
- Publication number 20170200265
- Publication date Jul 13, 2017
- KLA-Tencor Corporation
- Kris Bhaskar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GENERATING HIGH RESOLUTION IMAGES FROM LOW RESOLUTION IMAGES FOR SE...
- Publication number 20170193680
- Publication date Jul 6, 2017
- KLA-Tencor Corporation
- Jing Zhang
- G01 - MEASURING TESTING
Information Patent Application
HYBRID INSPECTORS
- Publication number 20170194126
- Publication date Jul 6, 2017
- KLA-Tencor Corporation
- Kris Bhaskar
- G01 - MEASURING TESTING
Information Patent Application
Systems and Methods for Defect Detection Using Image Reconstruction
- Publication number 20170191945
- Publication date Jul 6, 2017
- KLA-Tencor Corporation
- Jing Zhang
- G01 - MEASURING TESTING
Information Patent Application
Detecting Defects on a Wafer Using Defect-Specific and Multi-Channe...
- Publication number 20170091925
- Publication date Mar 30, 2017
- KLA-Tencor Corporation
- Kenong Wu
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Charged Particle Microscopy with Improved Ima...
- Publication number 20160372304
- Publication date Dec 22, 2016
- KLA-Tencor Corporation
- Doug K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER AND RETICLE INSPECTION SYSTEMS AND METHODS FOR SELECTING ILLU...
- Publication number 20160266047
- Publication date Sep 15, 2016
- KLA-Tencor Corporation
- Grace H. Chen
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION WITH FOCUS VOLUMETRIC METHOD
- Publication number 20160209334
- Publication date Jul 21, 2016
- KLA-Tencor Corporation
- Grace H. Chen
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Apodization in a Semiconductor Device Inspect...
- Publication number 20160054232
- Publication date Feb 25, 2016
- KLA-Tencor Corporation
- Jamie M. Sullivan
- G01 - MEASURING TESTING
Information Patent Application
Detecting Defects on a Wafer Using Defect-Specific and Multi-Channe...
- Publication number 20160027165
- Publication date Jan 28, 2016
- KLA-Tencor Corporation
- Kenong Wu
- G01 - MEASURING TESTING
Information Patent Application
Determining a Configuration for an Optical Element Positioned in a...
- Publication number 20150377797
- Publication date Dec 31, 2015
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Application
Scratch Filter for Wafer Inspection
- Publication number 20150063677
- Publication date Mar 5, 2015
- KLA-Tencor Corporation
- Junqing Huang
- G01 - MEASURING TESTING
Information Patent Application
WAFER AND RETICLE INSPECTION SYSTEMS AND METHODS FOR SELECTING ILLU...
- Publication number 20150015874
- Publication date Jan 15, 2015
- KLA-Tencor Corporation
- Grace H. Chen
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR FINDING A BEST APERTURE AND MODE TO ENHAN...
- Publication number 20140354983
- Publication date Dec 4, 2014
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING

Grace Jing Chen

Person

Patents Grantslast 30 patents

Selective marking of a substrate with fluorescent conjugated polyme...

Material recovery systems for optical components

Multimode defect classification in semiconductor inspection

Defect inspection and review using transmissive current image of ch...

Field curvature correction for multi-beam inspection systems

Wafer inspection using difference images

Method and system for charged particle microscopy with improved ima...

Correlating SEM and optical images for wafer noise nuisance identif...

Correlating SEM and optical images for wafer noise nuisance identif...

Generating high resolution images from low resolution images for se...

Method and system for charged particle microscopy with improved ima...

Ultra-high sensitivity hybrid inspection with full wafer coverage c...

Inspection system including parallel imaging paths with multiple an...

Systems and methods for defect detection using image reconstruction

Determining a configuration for an optical element positioned in a...

Apparatus and methods for finding a best aperture and mode to enhan...

Generating simulated output for a specimen

Hybrid inspectors

Detecting defects on a wafer using defect-specific and multi-channe...

Wafer inspection with focus volumetric method

Apparatus and methods for finding a best aperture and mode to enhan...

Determining a configuration for an optical element positioned in a...

System and method for reducing dynamic range in images of patterned...

System and method for apodization in a semiconductor device inspect...

Detecting defects on a wafer using defect-specific and multi-channe...

Wafer and reticle inspection systems and methods for selecting illu...

Scratch filter for wafer inspection

Enhanced high-speed logarithmic photo-detector for spot scanning sy...

Wafer and reticle inspection systems and methods for selecting illu...

Securing virtual machines with optimized anti-virus scan

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR REDUCING SAMPLE NOISE USING SELECTIVE MARKERS

MULTI-ELEMENT SUPER RESOLUTION OPTICAL INSPECTION SYSTEM

SELECTIVE MARKING OF A SUBSTRATE WITH FLUORESCENT PROBES HAVING A S...

SYSTEM AND METHOD FOR FEATURE SIGNAL ENHANCEMENT USING A SELECTIVEL...

SYSTEM AND METHOD FOR OPTICAL WAFER CHARACTERIZATION WITH IMAGE UP...

PROTECTION OF OPTICAL MATERIALS OF OPTICAL COMPONENTS FROM RADIATIO...

FLUORINE-DOPED OPTICAL MATERIALS FOR OPTICAL COMPONENTS

MATERIAL RECOVERY SYSTEMS FOR OPTICAL COMPONENTS

CORRELATING SEM AND OPTICAL IMAGES FOR WAFER NOISE NUISANCE IDENTIF...

Method and System for Charged Particle Microscopy with Improved Ima...

Multimode Defect Classification in Semiconductor Inspection

CORRELATING SEM AND OPTICAL IMAGES FOR WAFER NOISE NUISANCE IDENTIF...

WAFER INSPECTION USING DIFFERENCE IMAGES

APPARATUS AND METHODS FOR FINDING A BEST APERTURE AND MODE TO ENHAN...

Determining a Configuration for an Optical Element Positioned in a...

Field Curvature Correction for Multi-Beam Inspection Systems

GENERATING SIMULATED OUTPUT FOR A SPECIMEN

GENERATING HIGH RESOLUTION IMAGES FROM LOW RESOLUTION IMAGES FOR SE...

HYBRID INSPECTORS

Systems and Methods for Defect Detection Using Image Reconstruction

Detecting Defects on a Wafer Using Defect-Specific and Multi-Channe...

Method and System for Charged Particle Microscopy with Improved Ima...

WAFER AND RETICLE INSPECTION SYSTEMS AND METHODS FOR SELECTING ILLU...

WAFER INSPECTION WITH FOCUS VOLUMETRIC METHOD

System and Method for Apodization in a Semiconductor Device Inspect...

Detecting Defects on a Wafer Using Defect-Specific and Multi-Channe...

Determining a Configuration for an Optical Element Positioned in a...

Scratch Filter for Wafer Inspection

WAFER AND RETICLE INSPECTION SYSTEMS AND METHODS FOR SELECTING ILLU...

APPARATUS AND METHODS FOR FINDING A BEST APERTURE AND MODE TO ENHAN...