Graeme Jamieson SCOTT

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Sensor assembly and methods of vapor monitoring in process chambers
- Patent number 11,721,566
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Xiaozhou Che
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Edge ring for bevel polymer reduction
- Patent number 10,903,055
- Issue date Jan 26, 2021
- Applied Materials, Inc.
- Rohit Mishra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber lid heater ring assembly
- Patent number 10,595,365
- Issue date Mar 17, 2020
- Applied Materials, Inc.
- Alan H. Ouye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for dry etch with edge, side and back protection
- Patent number 10,170,277
- Issue date Jan 1, 2019
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic ion radical sieve and ion radical aperture for an inductive...
- Patent number 9,287,093
- Issue date Mar 15, 2016
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SENSOR ASSEMBLY AND METHODS OF VAPOR MONITORING IN PROCESS CHAMBERS
- Publication number 20230018891
- Publication date Jan 19, 2023
- Applied Materials, Inc.
- Xiaozhou CHE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR DRY ETCH WITH EDGE, SIDE AND BACK PROTECTION
- Publication number 20190096634
- Publication date Mar 28, 2019
- Applied Materials, Inc.
- Saravjeet SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING FOR BEVEL POLYMER REDUCTION
- Publication number 20160307742
- Publication date Oct 20, 2016
- Applied Materials, Inc.
- Rohit MISHRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC ION RADICAL SIEVE AND ION RADICAL APERTURE FOR AN INDUCTIVE...
- Publication number 20160181067
- Publication date Jun 23, 2016
- Applied Materials, Inc.
- Saravjeet SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Edge Protection and Efficiency Using Inert Gas and Ring
- Publication number 20140179108
- Publication date Jun 26, 2014
- Dung Huu Le
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC ION RADICAL SIEVE AND ION RADICAL APERTURE FOR AN INDUCTIVE...
- Publication number 20120305184
- Publication date Dec 6, 2012
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR DRY ETCH WITH EDGE, SIDE AND BACK PROTECTION
- Publication number 20120305185
- Publication date Dec 6, 2012
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER LID HEATER RING ASSEMBLY
- Publication number 20120090784
- Publication date Apr 19, 2012
- Applied Materials, Inc.
- Alan H. Ouye
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Graeme Jamieson SCOTT

Person

Patents Grantslast 30 patents

Sensor assembly and methods of vapor monitoring in process chambers

Edge ring for bevel polymer reduction

Chamber lid heater ring assembly

Apparatus and methods for dry etch with edge, side and back protection

Dynamic ion radical sieve and ion radical aperture for an inductive...

Patents Applicationslast 30 patents

SENSOR ASSEMBLY AND METHODS OF VAPOR MONITORING IN PROCESS CHAMBERS

APPARATUS AND METHODS FOR DRY ETCH WITH EDGE, SIDE AND BACK PROTECTION

EDGE RING FOR BEVEL POLYMER REDUCTION

DYNAMIC ION RADICAL SIEVE AND ION RADICAL APERTURE FOR AN INDUCTIVE...

Wafer Edge Protection and Efficiency Using Inert Gas and Ring

DYNAMIC ION RADICAL SIEVE AND ION RADICAL APERTURE FOR AN INDUCTIVE...

APPARATUS AND METHODS FOR DRY ETCH WITH EDGE, SIDE AND BACK PROTECTION

CHAMBER LID HEATER RING ASSEMBLY