Graham Hodgson

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Poulton-le-Fylde, GB

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Patents Grantslast 30 patents

Information Patent Grant
Thermal activation of fluorine for use in a semiconductor chamber
- Patent number 6,818,566
- Issue date Nov 16, 2004
- The BOC Group, Inc.
- Noel James Leeson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Sub-atmospheric supply of fluorine to semiconductor process chamber
- Publication number 20040074516
- Publication date Apr 22, 2004
- Richard A. Hogle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thermal activation of fluorine for use in a semiconductor chamber
- Publication number 20040077162
- Publication date Apr 22, 2004
- Noel James Leeson
- B08 - CLEANING