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Grant Kenji Larsen
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Gloucester, MA, US
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Patents Grants
last 30 patents
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Patent Grant
Method of measuring ion beam angles
Patent number
6,911,660
Issue date
Jun 28, 2005
Varian Semiconductor Equipment Associates, Inc.
Grant Kenji Larsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Surface structure and method of making, and electrostatic wafer cla...
Patent number
6,839,217
Issue date
Jan 4, 2005
Varian Semiconductor Equipment Associates, Inc.
Grant Kenji Larsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for high speed object handling
Patent number
6,748,293
Issue date
Jun 8, 2004
Varian Semiconductor Equipment Associates, Inc.
Grant Kenji Larsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam incidence angle and beam divergence monitor
Patent number
6,690,022
Issue date
Feb 10, 2004
Varian Semiconductor Equipment Associates, Inc.
Grant Kenji Larsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic wafer clamp having electrostatic seal for retaining gas
Patent number
6,362,946
Issue date
Mar 26, 2002
Varian Semiconductor Equipment Associates, Inc.
Grant Kenji Larsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic wafer clamp having low particulate contamination of w...
Patent number
5,969,934
Issue date
Oct 19, 1999
Varian Semiconductor Equipment Associats, Inc.
Grant Kenji Larsen
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
Information
Patent Application
Mehtod of measuring ion beam angles
Publication number
20040065849
Publication date
Apr 8, 2004
Varian Semiconductor Equipment Associates, Inc.
Grant Kenji Larsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrode configuration for retaining cooling gas on electrostatic...
Publication number
20040066601
Publication date
Apr 8, 2004
Varian Semiconductor Equipment Associates, Inc.
Grant Kenji Larsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
In situ ion beam incidence angle and beam divergence monitor
Publication number
20020121889
Publication date
Sep 5, 2002
Varian Semiconductor Equipment Associates, Inc.
Grant Kenji Larsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrostatic clamping of gallium arsenide and other high resistivi...
Publication number
20020114124
Publication date
Aug 22, 2002
Varian Semiconductor Equipment Associates, Inc.
Kevin G. Rhoads
H01 - BASIC ELECTRIC ELEMENTS