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Billerica, MA, US
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Patent Application
DUAL DAMASCENE INTEGRATION STRUCTURES AND METHOD OF FORMING IMPROVE...
Publication number
20090130861
Publication date
May 21, 2009
TEL Epion Inc.
John J. Hautala
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Dual damascene integration structure and method for forming improve...
Publication number
20050272237
Publication date
Dec 8, 2005
Epion Corporation
John J. Hautala
H01 - BASIC ELECTRIC ELEMENTS