Greg Farhner

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Beaverton, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for plasma-based deposition
- Patent number 8,962,101
- Issue date Feb 24, 2015
- Novellus Systems, Inc.
- Pramod Subramonium
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR PLASMA-BASED DEPOSITION
- Publication number 20140057454
- Publication date Feb 27, 2014
- Novellus Systems, Inc.
- Pramod Subramonium
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...