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Greg Siu
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Saratoga, CA, US
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last 30 patents
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Patent Grant
Method for forming TiSiN thin film layer by using atomic layer depo...
Patent number
9,159,608
Issue date
Oct 13, 2015
Aixtron SE
Woong Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD FOR FORMING TiSiN THIN FILM LAYER BY USING ATOMIC LAYER DEPO...
Publication number
20150050806
Publication date
Feb 19, 2015
AIXTRON SE
Woong Park
H01 - BASIC ELECTRIC ELEMENTS