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Gregory A. Appel
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San Francisco, CA, US
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last 30 patents
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Patent Grant
Polishing head for a chemical mechanical polishing apparatus
Patent number
6,159,083
Issue date
Dec 12, 2000
Aplex, Inc.
Gregory A. Appel
B24 - GRINDING POLISHING
Information
Patent Grant
Linear pad conditioning apparatus
Patent number
6,149,512
Issue date
Nov 21, 2000
Aplex, Inc.
Ethan C. Wilson
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer carrier head with inflatable bladder and attack angle control...
Patent number
6,080,040
Issue date
Jun 27, 2000
Aplex Group
Gregory A. Appel
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer polishing head drive
Patent number
6,062,961
Issue date
May 16, 2000
Aplex, Inc.
Linh X. Can
B24 - GRINDING POLISHING
Information
Patent Grant
Temperature regulation in a CMP process
Patent number
6,000,997
Issue date
Dec 14, 1999
Aplex, Inc.
Shu-Hsin Kao
B24 - GRINDING POLISHING