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Gregory A. Olsen
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Tempe, AZ, US
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Patents Grants
last 30 patents
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Patent Grant
Fluid metering system
Patent number
6,296,226
Issue date
Oct 2, 2001
SpeedFam-IPEC Corporation
Gregory A. Olsen
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information
Patent Grant
Vacuum system coupled to a wafer chuck for holding wet wafers
Patent number
6,241,226
Issue date
Jun 5, 2001
SpeedFam-IPEC Corporation
Gregory A. Olsen
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for rinsing wafers in the context of a combined cleaning...
Patent number
5,899,216
Issue date
May 4, 1999
Speedfam Corporation
Chad Goudie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for measuring and dispensing processing solut...
Patent number
5,857,893
Issue date
Jan 12, 1999
Speedfam Corporation
Gregory A. Olsen
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Method and apparatus for monitoring changes in the surface of a wor...
Publication number
20030045008
Publication date
Mar 6, 2003
Gregory Olsen
G01 - MEASURING TESTING