Gregory A. Roche

Person

Fort Collins, CO, US

People

Patents Grantslast 30 patents

Information Patent Grant
Sensor array for measuring plasma characteristics in plasma process...
- Patent number 8,545,669
- Issue date Oct 1, 2013
- KLA-Tencor Corporation
- Leonard J. Mahoney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer probe for measuring plasma and surface characteristics in pla...
- Patent number 7,192,505
- Issue date Mar 20, 2007
- Advanced Plasma, Inc.
- Gregory A. Roche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor array for measuring plasma characteristics in plasma process...
- Patent number 6,902,646
- Issue date Jun 7, 2005
- Advanced Energy Industries, Inc.
- Leonard J. Mahoney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer probe for measuring plasma and surface characteristics in pla...
- Patent number 6,830,650
- Issue date Dec 14, 2004
- Advanced Energy Industries, Inc.
- Gregory A. Roche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled ring-plasma source apparatus for processing gas...
- Patent number 6,432,260
- Issue date Aug 13, 2002
- Advanced Energy Industries, Inc.
- Leonard J. Mahoney
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Diagnostic plasma sensors for endpoint and end-of-life detection
- Publication number 20060171848
- Publication date Aug 3, 2006
- Advanced Energy Industries, Inc.
- Gregory A. Roche
- G01 - MEASURING TESTING
Information Patent Application
Diagnostic plasma measurement device having patterned sensors and f...
- Publication number 20050284570
- Publication date Dec 29, 2005
- Daniel B. Doran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sensor array for measuring plasma characteristics in plasma process...
- Publication number 20050151544
- Publication date Jul 14, 2005
- Advanced Energy Industries, Inc.
- Leonard J. Mahoney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer probe for measuring plasma and surface characteristics in pla...
- Publication number 20050039852
- Publication date Feb 24, 2005
- Advanced Energy Industries, Inc.
- Gregory A. Roche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sensor array for measuring plasma characteristics in plasma process...
- Publication number 20050034811
- Publication date Feb 17, 2005
- Leonard J. Mahoney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer probe for measuring plasma and surface characteristics in pla...
- Publication number 20050034812
- Publication date Feb 17, 2005
- Gregory A. Roche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer probe for measuring plasma and surface characteristics in pla...
- Publication number 20050011611
- Publication date Jan 20, 2005
- Leonard J. Mahoney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer probe for measuring plasma and surface characteristics in pla...
- Publication number 20040007326
- Publication date Jan 15, 2004
- Gregory A. Roche
- H01 - BASIC ELECTRIC ELEMENTS

Gregory A. Roche

Person

Patents Grantslast 30 patents

Sensor array for measuring plasma characteristics in plasma process...

Wafer probe for measuring plasma and surface characteristics in pla...

Sensor array for measuring plasma characteristics in plasma process...

Wafer probe for measuring plasma and surface characteristics in pla...

Inductively coupled ring-plasma source apparatus for processing gas...

Patents Applicationslast 30 patents

Diagnostic plasma sensors for endpoint and end-of-life detection

Diagnostic plasma measurement device having patterned sensors and f...

Sensor array for measuring plasma characteristics in plasma process...

Wafer probe for measuring plasma and surface characteristics in pla...

Sensor array for measuring plasma characteristics in plasma process...

Wafer probe for measuring plasma and surface characteristics in pla...

Wafer probe for measuring plasma and surface characteristics in pla...

Wafer probe for measuring plasma and surface characteristics in pla...