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Gregory BEACH
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Round Rock, TX, US
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Patents Grants
last 30 patents
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Patent Grant
Method of fabricating an integrated device
Patent number
8,570,638
Issue date
Oct 29, 2013
Silicon Light Machines Corporation
Joshua Lu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabricating an integrated device
Patent number
8,320,038
Issue date
Nov 27, 2012
Silicon Light Machines Corporation
Joshua Lu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Diffractive light modulator
Patent number
7,202,988
Issue date
Apr 10, 2007
Silicon Light Machines Corporation
Alexander P. Payne
G02 - OPTICS
Information
Patent Grant
Conductive etch stop for etching a sacrificial layer
Patent number
7,045,381
Issue date
May 16, 2006
Silicon Light Machines Corporation
Brent D. Lunceford
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Method of Fabricating an Integrated Device
Publication number
20130034958
Publication date
Feb 7, 2013
SILICON LIGHT MACHINES CORPORATION
Joshua LU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of Fabricating an Integrated Device
Publication number
20100149625
Publication date
Jun 17, 2010
Joshua Lu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for fabricating a Micro-Electromechanical device
Publication number
20080179182
Publication date
Jul 31, 2008
Silicon Light Machines Corporation
Khier Remadna
G02 - OPTICS