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Gregory Francis
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Escondido, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Lithography laser with beam delivery and beam pointing control
Patent number
7,230,964
Issue date
Jun 12, 2007
Cymer, Inc.
Plash P. Das
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas discharge laser light source beam delivery unit
Patent number
7,190,707
Issue date
Mar 13, 2007
Cymer, Inc.
Palash P. Das
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Gas discharge laser light source beam delivery unit
Publication number
20070160103
Publication date
Jul 12, 2007
Cymer, Inc.
Palash P. Das
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Gas discharge laser light source beam delivery unit
Publication number
20040179560
Publication date
Sep 16, 2004
Palash P. Das
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithography laser with beam delivery and beam pointing control
Publication number
20040022291
Publication date
Feb 5, 2004
Plash P. Das
G02 - OPTICS