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GREGORY GEORGE
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COLCHESTER, VT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus, system, and method for handling aligned wafer pairs
Patent number
11,651,983
Issue date
May 16, 2023
Suss MicroTec Lithography GmbH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and related techniques for handling aligned substrate pairs
Patent number
11,183,401
Issue date
Nov 23, 2021
Suss MicroTec Lithography GmbH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Baking device for a wafer coated with a coating containing a solvent
Patent number
10,825,701
Issue date
Nov 3, 2020
Suss MicroTec Lithography GmbH
Gregory George
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus, system, and method for handling aligned wafer pairs
Patent number
10,825,705
Issue date
Nov 3, 2020
Suss MicroTec Lithography GmbH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for semiconductor wafer leveling, force balanc...
Patent number
10,580,678
Issue date
Mar 3, 2020
Suss Microtec Lithography, GmbH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor bonding apparatus and related techniques
Patent number
10,319,615
Issue date
Jun 11, 2019
Suss MicroTec Lithography GmbH
Gregory George
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Semiconductor bonding apparatus and related techniques
Patent number
9,875,917
Issue date
Jan 23, 2018
SUSS MicroTech Lithography GmbH
Gregory George
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Apparatus and method for aligning and centering wafers
Patent number
9,859,141
Issue date
Jan 2, 2018
SUSS MicroTec Lithography GmbH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for semiconductor wafer leveling, force balanc...
Patent number
9,837,295
Issue date
Dec 5, 2017
SUSS MicroTec Lithography GmbH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus, system, and method for handling aligned wafer pairs
Patent number
9,640,418
Issue date
May 2, 2017
Suss MicroTec Lithography GmbH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Debonding temporarily bonded semiconductor wafers
Patent number
9,583,374
Issue date
Feb 28, 2017
SUSS MicroTec Lithography GmbH
Gregory George
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Debonding temporarily bonded semiconductor wafers
Patent number
9,472,437
Issue date
Oct 18, 2016
Suss MicroTec Lithography GmbH
Gregory George
B32 - LAYERED PRODUCTS
Information
Patent Grant
Bottle supply system and bottle cap adapter
Patent number
9,458,002
Issue date
Oct 4, 2016
Suss MicroTec Lithography GmbH
Oliver Treichel
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method for thermal-slide debonding of temporary bonded semiconducto...
Patent number
9,281,229
Issue date
Mar 8, 2016
Suss MicroTec Lithography GmbH
Gregory George
B32 - LAYERED PRODUCTS
Information
Patent Grant
Thin wafer carrier
Patent number
9,159,595
Issue date
Oct 13, 2015
Suss MicroTec Lithography GmbH
Daniel T. Hurley
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for temporary bonding of ultra thin wafers
Patent number
9,064,686
Issue date
Jun 23, 2015
Suss Microtec Lithography, GmbH
Gregory George
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Debonding temporarily bonded semiconductor wafers
Patent number
8,950,459
Issue date
Feb 10, 2015
Suss MicroTec Lithography GmbH
Gregory George
B32 - LAYERED PRODUCTS
Information
Patent Grant
Apparatus for thermal-slide debonding of temporary bonded semicondu...
Patent number
8,919,412
Issue date
Dec 30, 2014
Suss Microtec Lithography, GmbH
Gregory George
B32 - LAYERED PRODUCTS
Information
Patent Grant
Device for centering wafers
Patent number
8,764,026
Issue date
Jul 1, 2014
Suss Microtec Lithography, GmbH
Gregory George
B32 - LAYERED PRODUCTS
Information
Patent Grant
Apparatus and method for detaping an adhesive layer from the surfac...
Patent number
8,574,398
Issue date
Nov 5, 2013
Suss Microtec Lithography, GmbH
Gregory George
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Debonding equipment and methods for debonding temporary bonded wafers
Patent number
8,551,291
Issue date
Oct 8, 2013
Suss Microtec Lithography, GmbH
Gregory George
B32 - LAYERED PRODUCTS
Information
Patent Grant
Apparatus for high throughput wafer bonding
Patent number
8,425,715
Issue date
Apr 23, 2013
Suss Microtec Lithography, GmbH
Gregory George
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Debonding equipment and methods for debonding temporary bonded wafers
Patent number
8,366,873
Issue date
Feb 5, 2013
Suss Microtec Lithography, GmbH
Gregory George
B32 - LAYERED PRODUCTS
Information
Patent Grant
Apparatus for mechanically debonding temporary bonded semiconductor...
Patent number
8,267,143
Issue date
Sep 18, 2012
Suss Microtec Lithography, GmbH
Gregory George
B32 - LAYERED PRODUCTS
Information
Patent Grant
Method and apparatus for wafer bonding with enhanced wafer mating
Patent number
8,147,630
Issue date
Apr 3, 2012
Suss Microtec Lithography, GmbH
Gregory George
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Apparatus and method for semiconductor wafer alignment
Patent number
8,139,219
Issue date
Mar 20, 2012
Suss Microtec Lithography, GmbH
Gregory George
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for semiconductor bonding
Patent number
7,948,034
Issue date
May 24, 2011
Suss Microtec Lithography, GmbH
Gregory George
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nanoimprinting apparatus and method
Patent number
6,829,988
Issue date
Dec 14, 2004
Suss MicroTec, Inc.
Gregory A. George
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Automatic modular wafer substrate handling device
Patent number
6,178,361
Issue date
Jan 23, 2001
Karl Suss America, Inc.
Gregory George
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for handling semiconductor wafers
Patent number
5,622,400
Issue date
Apr 22, 1997
Karl Suss America, Inc.
Gregory George
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS, SYSTEM, AND METHOD FOR HANDLING ALIGNED WAFER PAIRS
Publication number
20210013079
Publication date
Jan 14, 2021
SUSS MICROTEC LITHOGRAPHY GMBH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Bonding Apparatus and Related Techniques
Publication number
20180108547
Publication date
Apr 19, 2018
SUSS MICROTEC LITHOGRAPHY GMBH
Gregory George
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
Apparatus and Method for Semiconductor Wafer Leveling, Force Balanc...
Publication number
20180102270
Publication date
Apr 12, 2018
SUSS MICROTEC LITHOGRAPHY, GMBH
HALE JOHNSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND RELATED TECHNIQUES FOR HANDLING ALIGNED SUBSTRATE PAIRS
Publication number
20170372925
Publication date
Dec 28, 2017
SUSS MICROTEC LITHOGRAPHY GMBH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Bonding Apparatus and Related Techniques
Publication number
20170243769
Publication date
Aug 24, 2017
SUSS MICROTEC LITHOGRAPHY GMBH
Gregory George
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS, SYSTEM, AND METHOD FOR HANDLING ALIGNED WAFER PAIRS
Publication number
20160336212
Publication date
Nov 17, 2016
SUSS MICROTEC LITHOGRAPHY GMBH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS, SYSTEM, AND METHOD FOR HANDLING ALIGNED WAFER PAIRS
Publication number
20160336208
Publication date
Nov 17, 2016
SUSS MICROTEC LITHOGRAPHY GMBH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Debonding Temporarily Bonded Semiconductor Wafers
Publication number
20160300747
Publication date
Oct 13, 2016
SUSS MICROTEC LITHOGRAPHY GMBH
Gregory George
B32 - LAYERED PRODUCTS
Information
Patent Application
BAKING DEVICE FOR A WAFER COATED WITH A COATING CONTAINING A SOLVENT
Publication number
20160148823
Publication date
May 26, 2016
SUSS MICROTEC LITHOGRAPHY GMBH
Gregory George
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BOTTLE SUPPLY SYSTEM AND BOTTLE CAP ADAPTER
Publication number
20150293453
Publication date
Oct 15, 2015
SUSS MICROTEC LITHOGRAPHY GMBH
Oliver TREICHEL
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
METHOD AND APPARATUS FOR TEMPORARY BONDING OF ULTRA THIN WAFERS
Publication number
20150251396
Publication date
Sep 10, 2015
SUSS MICROTEC LITHOGRAPHY GMBH
GREGORY GEORGE
B32 - LAYERED PRODUCTS
Information
Patent Application
SYSTEM AMD METHOD FOR SUBSTRATE HOLDING
Publication number
20150206783
Publication date
Jul 23, 2015
SUSS MICROTEC LITHOGRAPHY, GMBH
HALE JOHNSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Debonding Temporarily Bonded Semiconductor Wafers
Publication number
20150101744
Publication date
Apr 16, 2015
SUSS MICROTEC LITHOGRAPHY GMBH
Gregory George
B32 - LAYERED PRODUCTS
Information
Patent Application
METHOD FOR THERMAL-SLIDE DEBONDING OF TEMPORARY BONDED SEMICONDUCTO...
Publication number
20150083342
Publication date
Mar 26, 2015
SUSS MICROTEC LITHOGRAPHY, GMBH
GREGORY GEORGE
B32 - LAYERED PRODUCTS
Information
Patent Application
APPARATUS AND METHOD FOR ALIGNING AND CENTERING WAFERS
Publication number
20140319786
Publication date
Oct 30, 2014
SUSS MICROTEC LITHOGRAPHY, GMBH
HALE JOHNSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR SEMICONDUCTOR WAFER LEVELING, FORCE BALANC...
Publication number
20140318683
Publication date
Oct 30, 2014
HALE JOHNSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR TEMPORARY BONDING OF ULTRA THIN WAFERS
Publication number
20130244400
Publication date
Sep 19, 2013
SUSS MICROTEC LITHOGRAPHY GMBH
GREGORY GEORGE
B32 - LAYERED PRODUCTS
Information
Patent Application
Debonding Temporarily Bonded Semiconductor Wafers
Publication number
20130048224
Publication date
Feb 28, 2013
Gregory George
B32 - LAYERED PRODUCTS
Information
Patent Application
APPARATUS FOR HIGH THROUGHPUT WAFER BONDING
Publication number
20120080146
Publication date
Apr 5, 2012
SUSS MICROTEC LITHOGRAPHY, GMBH
Gregory George
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR DETAPING AN ADHESIVE LAYER FROM THE SURFAC...
Publication number
20110290415
Publication date
Dec 1, 2011
SUSS MICROTEC LITHOGRAPHY GMBH
GREGORY GEORGE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEBONDING EQUIPMENT AND METHODS FOR DEBONDING TEMPORARY BONDED WAFERS
Publication number
20110253314
Publication date
Oct 20, 2011
SUSS MICROTEC LITHOGRAPHY, GMBH
GREGORY GEORGE
B32 - LAYERED PRODUCTS
Information
Patent Application
DEBONDING EQUIPMENT AND METHODS FOR DEBONDING TEMPORARY BONDED WAFERS
Publication number
20110253315
Publication date
Oct 20, 2011
SUSS MICROTEC LITHOGRAPHY, GMBH
GREGORY GEORGE
B32 - LAYERED PRODUCTS
Information
Patent Application
THIN WAFER CARRIER
Publication number
20110198817
Publication date
Aug 18, 2011
SUSS MICROTEC INC
DANIEL T. HURLEY
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS FOR THERMAL-SLIDE DEBONDING OF TEMPORARY BONDED SEMICONDU...
Publication number
20110010908
Publication date
Jan 20, 2011
SUSS MICROTEC INC
GREGORY GEORGE
B32 - LAYERED PRODUCTS
Information
Patent Application
APPARATUS FOR MECHANICALLY DEBONDING TEMPORARY BONDED SEMICONDUCTOR...
Publication number
20100263794
Publication date
Oct 21, 2010
SUSS MICROTEC INC
GREGORY GEORGE
B32 - LAYERED PRODUCTS
Information
Patent Application
DEVICE FOR CENTERING WAFERS
Publication number
20100266373
Publication date
Oct 21, 2010
SUSS MICROTEC INC
GREGORY GEORGE
B32 - LAYERED PRODUCTS
Information
Patent Application
METHOD AND APPARATUS FOR WAFER BONDING WITH ENHANCED WAFER MATING
Publication number
20100122762
Publication date
May 20, 2010
SUSS MICROTEC INC
GREGORY GEORGE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR SEMICONDUCTOR WAFER ALIGNMENT
Publication number
20090251699
Publication date
Oct 8, 2009
SUSS MICROTEC INC
GREGORY GEORGE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR SEMICONDUCTOR BONDING
Publication number
20070296035
Publication date
Dec 27, 2007
SUSS MICROTEC INC
GREGORY GEORGE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NANOIMPRINTING APPARATUS AND METHOD
Publication number
20040226460
Publication date
Nov 18, 2004
Gregory A. George
B82 - NANO-TECHNOLOGY