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Gregory H. Bogush
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Aurora, IL, US
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Patents Grants
last 30 patents
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Patent Grant
Compositions and methods for dielectric CMP
Patent number
7,677,956
Issue date
Mar 16, 2010
Cabot Microelectronics Corporation
Phillip Carter
B24 - GRINDING POLISHING
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Patent Grant
Preequilibrium polishing method and system
Patent number
6,726,534
Issue date
Apr 27, 2004
Cabot Microelectronics Corporation
Gregory H. Bogush
B24 - GRINDING POLISHING
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Patent Grant
Alkali metal-containing polishing system and method
Patent number
6,612,911
Issue date
Sep 2, 2003
Cabot Microelectronics Corporation
Phillip Carter
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Patents Applications
last 30 patents
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Patent Application
Compositions and methods for dielectric CMP
Publication number
20030211815
Publication date
Nov 13, 2003
Cabot Microelectronics Corporation
Phillip Carter
B24 - GRINDING POLISHING
Information
Patent Application
Alkali metal-containing polishing system and method
Publication number
20030082998
Publication date
May 1, 2003
Cabot Microelectronics Corporation
Phillip Carter
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Integrated chemical-mechanical polishing
Publication number
20010037821
Publication date
Nov 8, 2001
Bradley J. Staley
B24 - GRINDING POLISHING