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Gregory L. Barbour
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San Luis Obispo, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing pad with built-in optical sensor
Patent number
7,083,497
Issue date
Aug 1, 2006
Strasbaugh, Inc.
David G. Halley
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad with built-in optical sensor
Patent number
6,986,701
Issue date
Jan 17, 2006
Strasbaugh
David G. Halley
B24 - GRINDING POLISHING
Information
Patent Grant
In situ feature height measurement
Patent number
6,976,901
Issue date
Dec 20, 2005
Strasbaugh
David G. Halley
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad sensor assembly with a damping pad
Patent number
6,884,150
Issue date
Apr 26, 2005
Strasbaugh
Greg Barbour
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad with built-in optical sensor
Patent number
6,739,945
Issue date
May 25, 2004
Strasbaugh
David G. Halley
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad with optical sensor
Patent number
6,726,528
Issue date
Apr 27, 2004
Strasbaugh
Greg Barbour
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Polishing pad with built-in optical sensor
Publication number
20070032170
Publication date
Feb 8, 2007
Strasbaugh
David G. Halley
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING PAD WITH BUILT-IN OPTICAL SENSOR
Publication number
20060116051
Publication date
Jun 1, 2006
Strasbaugh, Inc.
David G. Halley
B24 - GRINDING POLISHING
Information
Patent Application
Polishing pad with built-in optical sensor
Publication number
20050009449
Publication date
Jan 13, 2005
Strasbaugh
David G. Halley
B24 - GRINDING POLISHING
Information
Patent Application
Polishing pad with optical sensor
Publication number
20030216107
Publication date
Nov 20, 2003
Strasbaugh, Inc.
Greg Barbour
B24 - GRINDING POLISHING
Information
Patent Application
Polishing pad sensor assembly with a damping pad
Publication number
20030216108
Publication date
Nov 20, 2003
Greg Barbour
B24 - GRINDING POLISHING
Information
Patent Application
Polishing pad with built-in optical sensor
Publication number
20020090887
Publication date
Jul 11, 2002
David G. Halley
B24 - GRINDING POLISHING