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Gregory Martin Mason Corcoran
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Eindhoven, NL
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last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20120013865
Publication date
Jan 19, 2012
ASML NETHERLANDS B.V.
Thibault Simon Mathieu LAURENT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Immersion Lithographic Apparatus and a Device Manufacturing Method
Publication number
20100290013
Publication date
Nov 18, 2010
ASML NETHERLANDS B.V.
Christophe DE METSENAERE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
FLUID HANDLING DEVICE, AN IMMERSION LITHOGRAPHIC APPARATUS AND A DE...
Publication number
20100259735
Publication date
Oct 14, 2010
ASML NETHERLANDS B.V.
Erik Henricus Egidius Catharina Eummelen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY