Gregory O. Vaschenko

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San Diego, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Material supply apparatus for extreme ultraviolet light source havi...
- Patent number 9,669,334
- Issue date Jun 6, 2017
- ASML Netherlands B.V.
- Igor V. Fomenkov
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
FILTER FOR MATERIAL SUPPLY APPARATUS OF AN EXTREME ULTRAVIOLET LIGH...
- Publication number 20150209701
- Publication date Jul 30, 2015
- ASML NETHERLANDS B.V.
- Igor V. Fomenkov
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL