Gregory P. Hughes

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for calibrating a metrology tool
- Patent number 7,906,350
- Issue date Mar 15, 2011
- Toppan Photomasks, Inc.
- Gregory P. Hughes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for calibrating a metrology tool
- Patent number 7,663,156
- Issue date Feb 16, 2010
- Toppan Photomasks, Inc.
- Gregory P. Hughes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for optimizing a pellicle for off-axis transmi...
- Patent number 7,271,950
- Issue date Sep 18, 2007
- Toppan Photomasks, Inc.
- Joseph S Gordon
- G02 - OPTICS
Information Patent Grant
Method and apparatus for coupling a pellicle to a photomask using a...
- Patent number 6,911,283
- Issue date Jun 28, 2005
- Dupont Photomasks, Inc.
- Joseph Stephen Gordon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for calibrating a metrology tool
- Patent number 6,850,858
- Issue date Feb 1, 2005
- Dupont Photomasks, Inc.
- Craig A. West
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Damage resistant photomask construction
- Patent number 6,841,309
- Issue date Jan 11, 2005
- Dupont Photomasks, Inc.
- H. Ufuk Alpay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask and method for forming an opaque border on the same
- Patent number 6,803,158
- Issue date Oct 12, 2004
- Dupont Photomasks, Inc.
- Joseph Stephen Gordon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method and Apparatus for Calibrating a Metrology Tool
- Publication number 20100107724
- Publication date May 6, 2010
- Gregory P. Hughes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for calibrating a metrology tool
- Publication number 20060113556
- Publication date Jun 1, 2006
- Gregory P. Hughes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Gregory P. Hughes

Person

Patents Grantslast 30 patents

Method for calibrating a metrology tool

Method and apparatus for calibrating a metrology tool

Apparatus and method for optimizing a pellicle for off-axis transmi...

Method and apparatus for coupling a pellicle to a photomask using a...

Method and apparatus for calibrating a metrology tool

Damage resistant photomask construction

Photomask and method for forming an opaque border on the same

Patents Applicationslast 30 patents

Method and Apparatus for Calibrating a Metrology Tool

Method and apparatus for calibrating a metrology tool