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Gregory Paul THOMES
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Chaska, MN, US
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Patents Grants
last 30 patents
Information
Patent Grant
System and method for monitoring treatment of microelectronic subst...
Patent number
10,748,788
Issue date
Aug 18, 2020
Tel FSI, Inc.
Brent D. Schwab
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for scanning an object through a fluid stream
Patent number
10,020,207
Issue date
Jul 10, 2018
Tel FSI, Inc.
Mark Goluch
B08 - CLEANING
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Patent Grant
Apparatus and method for scanning an object through a fluid spray
Patent number
9,321,087
Issue date
Apr 26, 2016
TFL FSI, Inc.
Mark Goluch
B08 - CLEANING
Information
Patent Grant
Eliminating stiction with the use of cryogenic aerosol
Patent number
6,036,786
Issue date
Mar 14, 2000
FSI International Inc.
David Scott Becker
B24 - GRINDING POLISHING
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Patent Grant
Rotatable and translatable spray nozzle
Patent number
5,942,037
Issue date
Aug 24, 1999
FSI International, Inc.
Thomas J. Wagener
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM AND METHOD FOR MONITORING TREATMENT OF MICROELECTRONIC SUBST...
Publication number
20180269080
Publication date
Sep 20, 2018
TEL FSI, Inc.
Brent D. Schwab
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR SCANNING AN OBJECT THROUGH A FLUID STREAM
Publication number
20160276182
Publication date
Sep 22, 2016
TEL FSI, Inc.
Mark GOLUCH
B08 - CLEANING
Information
Patent Application
APPARATUS AND METHOD FOR SCANNING AN OBJECT THROUGH A FLUID SPRAY
Publication number
20150068560
Publication date
Mar 12, 2015
TEL FSI, Inc.
Mark GOLUCH
B08 - CLEANING
Information
Patent Application
Nozzle design for generating fluid streams useful in the manufactur...
Publication number
20060105683
Publication date
May 18, 2006
James F. Weygand
B08 - CLEANING