Gregory R. Brady

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Optical metrology tool equipped with modulated illumination sources
- Patent number 11,913,874
- Issue date Feb 27, 2024
- KLA Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Reflective pupil relay system
- Patent number 10,976,249
- Issue date Apr 13, 2021
- KLA-Tencor Corporation
- Andrew Hill
- G02 - OPTICS
Information Patent Grant
Optical metrology tool equipped with modulated illumination sources
- Patent number 10,969,328
- Issue date Apr 6, 2021
- KLA Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Off-axis reflective afocal optical relay
- Patent number 10,527,830
- Issue date Jan 7, 2020
- KLA-Tencor Corporation
- Andrew V. Hill
- G02 - OPTICS
Information Patent Grant
Optical metrology tool equipped with modulated illumination sources
- Patent number 10,215,688
- Issue date Feb 26, 2019
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Systems for providing illumination in optical metrology
- Patent number 10,203,247
- Issue date Feb 12, 2019
- KLA-Tencor Corporation
- Gregory R. Brady
- F21 - LIGHTING
Information Patent Grant
Compressive sensing for metrology
- Patent number 10,062,157
- Issue date Aug 28, 2018
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Compressive sensing for metrology
- Patent number 9,518,916
- Issue date Dec 13, 2016
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- G01 - MEASURING TESTING
Information Patent Grant
Systems for providing illumination in optical metrology
- Patent number 9,512,985
- Issue date Dec 6, 2016
- KLA-Tencor Corporation
- Gregory R. Brady
- G02 - OPTICS
Information Patent Grant
Optical metrology tool equipped with modulated illumination sources
- Patent number 9,400,246
- Issue date Jul 26, 2016
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Multiple angles of incidence semiconductor metrology systems and me...
- Patent number 9,310,290
- Issue date Apr 12, 2016
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Metrology system optimization for parameter tracking
- Patent number 9,255,877
- Issue date Feb 9, 2016
- KLA-Tencor Corporation
- Andrei Veldman
- G01 - MEASURING TESTING
Information Patent Grant
Multiple angles of incidence semiconductor metrology systems and me...
- Patent number 9,116,103
- Issue date Aug 25, 2015
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method of measuring roughness and other parameters of...
- Patent number 8,982,358
- Issue date Mar 17, 2015
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES
- Publication number 20210223166
- Publication date Jul 22, 2021
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
Optical Metrology Tool Equipped with Modulated Illumination Sources
- Publication number 20190195782
- Publication date Jun 27, 2019
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
Off-Axis Reflective Afocal Optical Relay
- Publication number 20180045932
- Publication date Feb 15, 2018
- KLA-Tencor Corporation
- Andrew V. Hill
- G02 - OPTICS
Information Patent Application
Systems for Providing Illumination in Optical Metrology
- Publication number 20170146399
- Publication date May 25, 2017
- KLA-Tencor Corporation
- Gregory R. Brady
- G02 - OPTICS
Information Patent Application
COMPRESSIVE SENSING FOR METROLOGY
- Publication number 20170076440
- Publication date Mar 16, 2017
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Optical Metrology Tool Equipped with Modulated Illumination Sources
- Publication number 20170016815
- Publication date Jan 19, 2017
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...
- Publication number 20150285735
- Publication date Oct 8, 2015
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Application
MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...
- Publication number 20140375981
- Publication date Dec 25, 2014
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY SYSTEM OPTIMIZATION FOR PARAMETER TRACKING
- Publication number 20140347666
- Publication date Nov 27, 2014
- Andrei Veldman
- G01 - MEASURING TESTING
Information Patent Application
Systems for Providing Illumination in Optical Metrology
- Publication number 20140240951
- Publication date Aug 28, 2014
- KLA-Tencor Corporation
- Gregory R. Brady
- G02 - OPTICS
Information Patent Application
Apparatus And Method Of Measuring Roughness And Other Parameters Of...
- Publication number 20130182263
- Publication date Jul 18, 2013
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
Optical Metrology Tool Equipped with Modulated Illumination Sources
- Publication number 20130169966
- Publication date Jul 4, 2013
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING

Gregory R. Brady

Person

Patents Grantslast 30 patents

Optical metrology tool equipped with modulated illumination sources

Reflective pupil relay system

Optical metrology tool equipped with modulated illumination sources

Off-axis reflective afocal optical relay

Optical metrology tool equipped with modulated illumination sources

Systems for providing illumination in optical metrology

Compressive sensing for metrology

Compressive sensing for metrology

Systems for providing illumination in optical metrology

Optical metrology tool equipped with modulated illumination sources

Multiple angles of incidence semiconductor metrology systems and me...

Metrology system optimization for parameter tracking

Multiple angles of incidence semiconductor metrology systems and me...

Apparatus and method of measuring roughness and other parameters of...

Patents Applicationslast 30 patents

OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES

Optical Metrology Tool Equipped with Modulated Illumination Sources

Off-Axis Reflective Afocal Optical Relay

Systems for Providing Illumination in Optical Metrology

COMPRESSIVE SENSING FOR METROLOGY

Optical Metrology Tool Equipped with Modulated Illumination Sources

MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...

MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...

METROLOGY SYSTEM OPTIMIZATION FOR PARAMETER TRACKING

Systems for Providing Illumination in Optical Metrology

Apparatus And Method Of Measuring Roughness And Other Parameters Of...

Optical Metrology Tool Equipped with Modulated Illumination Sources