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Gregory R. Whyman
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West Newbury, MA, US
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last 30 patents
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Patent Grant
High throughput thermal treatment system and method of operating
Patent number
8,303,715
Issue date
Nov 6, 2012
Tokyo Electron Limited
Thomas Hamelin
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
HIGH THROUGHPUT THERMAL TREATMENT SYSTEM AND METHOD OF OPERATING
Publication number
20100025368
Publication date
Feb 4, 2010
TOKYO ELECTRON LIMITED
Thomas Hamelin
H01 - BASIC ELECTRIC ELEMENTS