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Gregory Redinbo
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Wenham, MA, US
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last 30 patents
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Patent Grant
Active particle trapping for process control
Patent number
8,461,552
Issue date
Jun 11, 2013
Varian Semiconductor Equipment Associates, Inc.
Peter Nunan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
ACTIVE PARTICLE TRAPPING FOR PROCESS CONTROL
Publication number
20110049359
Publication date
Mar 3, 2011
Varian Semiconductor Equipment Associates, Inc.
Peter Nunan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Active particle trapping for process control
Publication number
20080157007
Publication date
Jul 3, 2008
Varian Semiconductor Equipment Associates, Inc.
Peter Nunan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...