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Gregory S. Davis
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Woburn, MA, US
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last 30 patents
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Patent Grant
Fabrication of tungsten MEMS structures
Patent number
9,878,901
Issue date
Jan 30, 2018
Analog Devices, Inc.
John A. Geen
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Fabrication of Tungsten MEMS Structures
Publication number
20150336790
Publication date
Nov 26, 2015
Analog Devices, Inc.
John A. Geen
B81 - MICRO-STRUCTURAL TECHNOLOGY