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Gregory Skibinski
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Orefield, PA, US
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last 30 patents
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Patent Grant
Method and system for chemical injection in silicon wafer processing
Patent number
6,767,877
Issue date
Jul 27, 2004
Akrion, LLC
Chang Kuo
B08 - CLEANING
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last 30 patents
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Patent Application
Method and system for chemical injection in silicon wafer processing
Publication number
20020144713
Publication date
Oct 10, 2002
Chang Kuo
H01 - BASIC ELECTRIC ELEMENTS