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Ulm, DE
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last 30 patents
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Patent Application
METHOD AND APPARATUS FOR QUALIFYING A MASK FOR USE IN LITHOGRAPHY
Publication number
20240085779
Publication date
Mar 14, 2024
Carl Zeiss SMT GMBH
Renzo Capelli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHOD FOR MEASURING A REFLECTIVITY OF AN OBJECT FOR MEASUREMENT LI...
Publication number
20220236648
Publication date
Jul 28, 2022
Carl Zeiss SMT GMBH
Renzo Capelli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY