Gu Xun

Person

Sendai-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Wiring structure having interlayer insulating film and wiring line...
- Patent number 9,543,191
- Issue date Jan 10, 2017
- Zeon Corporation
- Takenao Nemoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching film having transition metal
- Patent number 9,096,937
- Issue date Aug 4, 2015
- Tokyo Electron Limited
- Xun Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,889,545
- Issue date Nov 18, 2014
- National University Corporation Tohoku University
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR ETCHING GROUP III-V SEMICONDUCTOR AND APPARATUS FOR ETCH...
- Publication number 20160211145
- Publication date Jul 21, 2016
- TOKYO ELECTRON LIMITED
- Xun Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR-DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
- Publication number 20150041983
- Publication date Feb 12, 2015
- TOKYO ELECTRON LIMITED
- Takenao Nemoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WIRING STRUCTURE, SEMICONDUCTOR DEVICE INCLUDING WIRING STRUCTURE,...
- Publication number 20140306344
- Publication date Oct 16, 2014
- TOHOKU UNIVERSITY
- Shigetoshi Sugawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ETCHING FILM HAVING TRANSITION METAL
- Publication number 20140291288
- Publication date Oct 2, 2014
- Tohoku University
- Xun GU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20140225263
- Publication date Aug 14, 2014
- TOHOKU UNIVERSITY
- Takenao Nemoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DE...
- Publication number 20130187283
- Publication date Jul 25, 2013
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Chemical Mechanical Polishing
- Publication number 20100240283
- Publication date Sep 23, 2010
- ARACA Incorporation
- Takenao Nemoto
- B24 - GRINDING POLISHING

Person

Patents Grantslast 30 patents

Wiring structure having interlayer insulating film and wiring line...

Method for etching film having transition metal

Method of manufacturing a semiconductor device

Patents Applicationslast 30 patents

METHOD FOR ETCHING GROUP III-V SEMICONDUCTOR AND APPARATUS FOR ETCH...

SEMICONDUCTOR-DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE

WIRING STRUCTURE, SEMICONDUCTOR DEVICE INCLUDING WIRING STRUCTURE,...

METHOD FOR ETCHING FILM HAVING TRANSITION METAL

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DE...

Method of Chemical Mechanical Polishing