Guangchi Xuan

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning of chamber components with solid carbon dioxide particles
- Patent number 9,925,639
- Issue date Mar 27, 2018
- Applied Materials, Inc.
- Song-Moon Suh
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
CLEANING OF CHAMBER COMPONENTS WITH SOLID CARBON DIOXIDE PARTICLES
- Publication number 20160016286
- Publication date Jan 21, 2016
- Applied Materials, Inc.
- Song-Moon Suh
- B08 - CLEANING