Guanghong Duan

Person

Beijing, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Two-dimensional locating method of motion platform based on magneti...
- Patent number 9,455,650
- Issue date Sep 27, 2016
- Tsinghua University
- Jinchun Hu
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Dual wafer stage exchanging system for lithographic device
- Patent number 9,030,648
- Issue date May 12, 2015
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dual-stage exchange system for lithographic apparatus
- Patent number 8,860,927
- Issue date Oct 14, 2014
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dual-stage exchange system for lithographic apparatus
- Patent number 8,836,918
- Issue date Sep 16, 2014
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Nanometer-precision six-degree-of-freedom magnetic suspension micro...
- Patent number 8,599,361
- Issue date Dec 3, 2013
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dual-stage switching system for lithographic machine
- Patent number 8,284,380
- Issue date Oct 9, 2012
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Micro stage with 6 degrees of freedom
- Patent number 8,084,897
- Issue date Dec 27, 2011
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Synchronous permanent magnet planar motor
- Patent number 7,339,289
- Issue date Mar 4, 2008
- Tsinghua University
- Jinsong Wang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Scanning mechanism of an ion implanter
- Patent number 7,259,380
- Issue date Aug 21, 2007
- Tsinghua University
- Jinsong Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Parallel structure of a spatial 3-axis machine tool with three degr...
- Patent number 6,575,676
- Issue date Jun 10, 2003
- Tsinghua University
- Jinsong Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Type of parallel machine tool frame driven by slider and extensible...
- Patent number 6,402,444
- Issue date Jun 11, 2002
- Tsinghua University
- Jinsong Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
NANOMETER-PRECISION SIX-DEGREE-OF-FREEDOM MAGNETIC SUSPENSION MICRO...
- Publication number 20130038853
- Publication date Feb 14, 2013
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TWO-DIMENSIONAL LOCATING METHOD OF MOTION PLATFORM BASED ON MAGNETI...
- Publication number 20130024157
- Publication date Jan 24, 2013
- Jinchun Hu
- G01 - MEASURING TESTING
Information Patent Application
DUAL WAFER STAGE EXCHANGING SYSTEM FOR LITHOGRAPHIC DEVICE
- Publication number 20120127448
- Publication date May 24, 2012
- TSINGHUA UNIVERSITY
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DUAL-STAGE EXCHANGE SYSTEM FOR LITHOGRAPHIC APPARATUS
- Publication number 20120099094
- Publication date Apr 26, 2012
- TSINGHUA UNIVERSITY
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DUAL-STAGE EXCHANGE SYSTEM FOR LITHOGRAPHIC APPARATUS
- Publication number 20120099095
- Publication date Apr 26, 2012
- TSINGHUA UNIVERSITY
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DUAL-STAGE SWITCHING SYSTEM FOR LITHOGRAPHIC MACHINE
- Publication number 20100208227
- Publication date Aug 19, 2010
- TSINGHUA UNIVERSITY
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICRO STAGE WITH 6 DEGREES OF FREEDOM
- Publication number 20100187917
- Publication date Jul 29, 2010
- TSINGHUA UNIVERSITY
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Synchronous permanent magnet planar motor
- Publication number 20060049699
- Publication date Mar 9, 2006
- TSINGHUA UNIVERSITY
- Jinsong Wang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Scanning mechanism of an ion implanter
- Publication number 20050285052
- Publication date Dec 29, 2005
- TSINGHUA UNIVERSITY
- Jinsong Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Parallel structure of a spatial 3-axis machine tool with three degr...
- Publication number 20020015624
- Publication date Feb 7, 2002
- Jinsong Wang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Guanghong Duan

Person

Patents Grantslast 30 patents

Two-dimensional locating method of motion platform based on magneti...

Dual wafer stage exchanging system for lithographic device

Dual-stage exchange system for lithographic apparatus

Dual-stage exchange system for lithographic apparatus

Nanometer-precision six-degree-of-freedom magnetic suspension micro...

Dual-stage switching system for lithographic machine

Micro stage with 6 degrees of freedom

Synchronous permanent magnet planar motor

Scanning mechanism of an ion implanter

Parallel structure of a spatial 3-axis machine tool with three degr...

Type of parallel machine tool frame driven by slider and extensible...

Patents Applicationslast 30 patents

NANOMETER-PRECISION SIX-DEGREE-OF-FREEDOM MAGNETIC SUSPENSION MICRO...

TWO-DIMENSIONAL LOCATING METHOD OF MOTION PLATFORM BASED ON MAGNETI...

DUAL WAFER STAGE EXCHANGING SYSTEM FOR LITHOGRAPHIC DEVICE

DUAL-STAGE EXCHANGE SYSTEM FOR LITHOGRAPHIC APPARATUS

DUAL-STAGE EXCHANGE SYSTEM FOR LITHOGRAPHIC APPARATUS

DUAL-STAGE SWITCHING SYSTEM FOR LITHOGRAPHIC MACHINE

MICRO STAGE WITH 6 DEGREES OF FREEDOM

Synchronous permanent magnet planar motor

Scanning mechanism of an ion implanter

Parallel structure of a spatial 3-axis machine tool with three degr...