Guangqing Chen

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for inspection and metrology
- Patent number 12,204,826
- Issue date Jan 21, 2025
- ASML Netherlands B.V.
- Lotte Marloes Willems
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspection and metrology
- Patent number 11,580,274
- Issue date Feb 14, 2023
- ASML Netherlands B.V.
- Lotte Marloes Willems
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for design of a metrology target
- Patent number 11,221,560
- Issue date Jan 11, 2022
- ASML Netherlands B.V.
- Guangqing Chen
- G01 - MEASURING TESTING
Information Patent Grant
Process based metrology target design
- Patent number 10,296,681
- Issue date May 21, 2019
- ASML Netherlands B.V.
- Guangqing Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for design of a metrology target
- Patent number 10,296,692
- Issue date May 21, 2019
- ASML Netherlands B.V.
- Guangqing Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process based metrology target design
- Patent number 10,007,744
- Issue date Jun 26, 2018
- ASML Netherlands B.V.
- Guangqing Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for design of a metrology target
- Patent number 9,804,504
- Issue date Oct 31, 2017
- ASML Netherlands B.V.
- Guangqing Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for design of a metrology target
- Patent number 9,494,874
- Issue date Nov 15, 2016
- ASML Netherlands B.V.
- Guangqing Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for design of a metrology target
- Patent number 9,355,200
- Issue date May 31, 2016
- ASML Netherlands B.V.
- Guangqing Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for lithography model calibration
- Patent number 7,488,933
- Issue date Feb 10, 2009
- Brion Technologies, Inc.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
- Publication number 20230185990
- Publication date Jun 15, 2023
- ASML NETHERLANDS B.V.
- Lotte Marloes Willems
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET
- Publication number 20220113638
- Publication date Apr 14, 2022
- ASML NETHERLANDS B.V.
- Guangqing CHEN
- G01 - MEASURING TESTING
Information Patent Application
PROCESS BASED METROLOGY TARGET DESIGN
- Publication number 20180268093
- Publication date Sep 20, 2018
- ASML NETHERLANDS B.V.
- Guangqing CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
- Publication number 20180046737
- Publication date Feb 15, 2018
- ASML NETHERLANDS B.V.
- Lotte Marloes WILLEMS
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET
- Publication number 20160252820
- Publication date Sep 1, 2016
- ASML NETHERLANDS B.V.
- Guangqing Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESS BASED METROLOGY TARGET DESIGN
- Publication number 20160140267
- Publication date May 19, 2016
- ASML NETHERLANDS B.V.
- Guangqing CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET
- Publication number 20150186581
- Publication date Jul 2, 2015
- ASML NETHERLANDS B.V.
- Guangqing Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET
- Publication number 20150186582
- Publication date Jul 2, 2015
- ASML NETHERLANDS B.V.
- Guangqing CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET
- Publication number 20150185625
- Publication date Jul 2, 2015
- ASML NETHERLANDS B.V.
- Guangqing CHEN
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET
- Publication number 20150185626
- Publication date Jul 2, 2015
- ASML NETHERLANDS B.V.
- Guangqing CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR LITHOGRAPHY MODEL CALIBRATION
- Publication number 20070032896
- Publication date Feb 8, 2007
- BRION TECHNOLOGIES, INC.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Guangqing Chen

Person

Patents Grantslast 30 patents

Method and apparatus for inspection and metrology

Method and apparatus for inspection and metrology

Method and apparatus for design of a metrology target

Process based metrology target design

Method and apparatus for design of a metrology target

Process based metrology target design

Method and apparatus for design of a metrology target

Method and apparatus for design of a metrology target

Method and apparatus for design of a metrology target

Method for lithography model calibration

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR INSPECTION AND METROLOGY

METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET

PROCESS BASED METROLOGY TARGET DESIGN

METHOD AND APPARATUS FOR INSPECTION AND METROLOGY

METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET

PROCESS BASED METROLOGY TARGET DESIGN

METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET

METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET

METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET

METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET

METHOD FOR LITHOGRAPHY MODEL CALIBRATION