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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of plasma etching of high-K dielectric materials
Patent number
7,838,434
Issue date
Nov 23, 2010
Applied Materials, Inc.
Guangxiang Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch methods to form anisotropic features for high aspect ratio app...
Patent number
7,368,394
Issue date
May 6, 2008
Applied Materials, Inc.
Meihua Shen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of plasma etching high-K dielectric materials with high sele...
Patent number
7,217,665
Issue date
May 15, 2007
Applied Materials, Inc.
Padmapani C. Nallan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of plasma etching of high-K dielectric materials
Patent number
7,094,704
Issue date
Aug 22, 2006
Applied Materials, Inc.
Guangxiang Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of preventing short circuits in magnetic film stacks
Patent number
6,893,893
Issue date
May 17, 2005
Padmapani C. Nallan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching methods for a magnetic memory cell stack
Patent number
6,821,907
Issue date
Nov 23, 2004
Jeng H. Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of plasma etching of high-K dielectric materials with high s...
Patent number
6,806,095
Issue date
Oct 19, 2004
Padmapani C. Nallan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating a gate structure of a field effect transistor...
Patent number
6,767,824
Issue date
Jul 27, 2004
Padmapani C. Nallan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a cup capacitor
Patent number
6,730,561
Issue date
May 4, 2004
Applied Materials, Inc.
Jeng H. Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning apparatus and method
Patent number
6,692,903
Issue date
Feb 17, 2004
Applied Materials, Inc.
Haojiang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for preventing corrosion of a dielectric material
Patent number
6,368,517
Issue date
Apr 9, 2002
Applied Materials, Inc.
Jeng H. Hwang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ETCH METHODS TO FORM ANISOTROPIC FEATURES FOR HIGH ASPECT RATIO APP...
Publication number
20080057729
Publication date
Mar 6, 2008
Meihua Shen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etch methods to form anisotropic features for high aspect ratio app...
Publication number
20070202700
Publication date
Aug 30, 2007
APPLIED MATERIALS, INC.
Uwe Leucke
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Etch methods to form anisotropic features for high aspect ratio app...
Publication number
20070199922
Publication date
Aug 30, 2007
APPLIED MATERIALS, INC.
Meihua Shen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PLASMA ETCHING OF HIGH-K DIELECTRIC MATERIALS
Publication number
20070077767
Publication date
Apr 5, 2007
Applied Materials, Inc.
Guangxiang Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching high-kappa dielectric materials with good high-kappa foot c...
Publication number
20060252265
Publication date
Nov 9, 2006
Guangxiang Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of etching metals with high selectivity to hafnium-based die...
Publication number
20060060565
Publication date
Mar 23, 2006
APPLIED MATERIALS, INC.
Padmapani C. Nallan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of etching metals with high selectivity to hafnium-based die...
Publication number
20040206724
Publication date
Oct 21, 2004
APPLIED MATERIALS, INC.
Padmapani C. Nallan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of plasma etching of high-K dielectric materials with high s...
Publication number
20040173572
Publication date
Sep 9, 2004
APPLIED MATERIALS, INC.
Padmapani C. Nallan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of etching metallic materials to form a tapered profile
Publication number
20040171272
Publication date
Sep 2, 2004
APPLIED MATERIALS, INC.
Guangxiang Jin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of etching high-K dielectric materials
Publication number
20040132311
Publication date
Jul 8, 2004
APPLIED MATERIALS, INC.
Padmapani C. Nallan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of plasma etching high-K dielectric materials with high sele...
Publication number
20040097092
Publication date
May 20, 2004
APPLIED MATERIALS, INC.
Padmapani C. Nallan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of fabricating a gate structure of a field effect transistor...
Publication number
20040058517
Publication date
Mar 25, 2004
APPLIED MATERIALS, INC.
Padmapani C. Nallan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for plasma etching of high-K dielectric materials
Publication number
20040007561
Publication date
Jan 15, 2004
APPLIED MATERIALS, INC.
Padmapani Nallan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of plasma etching of high-K dielectric materials
Publication number
20030211748
Publication date
Nov 13, 2003
APPLIED MATERIALS, INC.
Guangxiang Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of preventing short circuits in magnetic film stacks
Publication number
20030180968
Publication date
Sep 25, 2003
APPLIED MATERIALS, INC.
Padmapani C. Nallan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching methods for a magnetic memory cell stack
Publication number
20030170985
Publication date
Sep 11, 2003
APPLIED MATERIALS, INC.
Jeng H. Hwang
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method of plasma etching of high-K dielectric materials with high s...
Publication number
20030170986
Publication date
Sep 11, 2003
APPLIED MATERIALS, INC.
Padmapani C. Nallan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming a cup capacitor
Publication number
20030013252
Publication date
Jan 16, 2003
Jeng H. Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate cleaning apparatus and method
Publication number
20020072016
Publication date
Jun 13, 2002
APPLIED MATERIALS, INC.
Haojiang Chen
H01 - BASIC ELECTRIC ELEMENTS