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Guenter Makosch
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Sindelfingen, DE
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last 30 patents
Information
Patent Grant
Interferometric phase measurement
Patent number
5,392,116
Issue date
Feb 21, 1995
International Business Machines Corporation
Guenter Makosch
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric mask-wafer alignment
Patent number
4,779,001
Issue date
Oct 18, 1988
International Business Machines Corporation
Guenter Makosch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for testing optical imaging systems
Patent number
4,429,992
Issue date
Feb 7, 1984
International Business Machines Corporation
Gerd Haeusler
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric measuring system
Patent number
4,188,124
Issue date
Feb 12, 1980
International Business Machines Corporation
Walter Jaerisch
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric apparatus and process
Patent number
4,167,337
Issue date
Sep 11, 1979
International Business Machines Corporation
Walter Jaerisch
G01 - MEASURING TESTING