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Aalen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Device for sealing a projection exposure apparatus
Patent number
7,130,017
Issue date
Oct 31, 2006
Carl Zeiss SMT AG
Albrecht Hof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device for holding measurement instruments
Patent number
7,126,692
Issue date
Oct 24, 2006
Carl Zeiss SMT AG
Guenter Maul
G01 - MEASURING TESTING
Information
Patent Grant
Optical system with isolated measuring structure
Patent number
6,864,988
Issue date
Mar 8, 2005
Carl Zeiss Semiconductor Manufacturing Technologies AG
Albrecht Hof
G02 - OPTICS
Information
Patent Grant
Optical imaging device, in particular lens system, with at least on...
Patent number
6,445,510
Issue date
Sep 3, 2002
Carl-Zeiss-Stiftung
Karlheinz Schuster
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
Device for sealing a projection exposure apparatus
Publication number
20050206860
Publication date
Sep 22, 2005
Carl Zeiss SMT AG
Albrecht Hof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device for holding measurement instruments
Publication number
20040146336
Publication date
Jul 29, 2004
Carl Zeiss SMT AG
Guenter Maul
G01 - MEASURING TESTING
Information
Patent Application
Optical system with a plurality of optical elements
Publication number
20030010902
Publication date
Jan 16, 2003
CARL-ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Albrecht Hof
G02 - OPTICS