Guenter Schieferstein

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Huettenberg, DE

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Patents Grantslast 30 patents

Information Patent Grant
Device for measuring positions of structures on a substrate
- Patent number 7,817,262
- Issue date Oct 19, 2010
- Vistec Semiconductor Systems GmbH
- Tillmann Ehrenberg
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Coordinate measuring machine with vibration decoupling and method f...
- Publication number 20090002715
- Publication date Jan 1, 2009
- Vistec Semiconductor Systems GmbH
- Uwe Goetz
- G01 - MEASURING TESTING
Information Patent Application
Device for measuring positions of structures on a substrate
- Publication number 20090002720
- Publication date Jan 1, 2009
- Vistec Semiconductor Systems GmbH
- Tillmann Ehrenberg
- G01 - MEASURING TESTING