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Guenter Schmidt
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Leun, DE
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Patents Grants
last 30 patents
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Patent Grant
Wafer inspection device
Patent number
7,424,393
Issue date
Sep 9, 2008
Vistec Semiconductor Systems GmbH
Michael Halama
G01 - MEASURING TESTING
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Patent Grant
Method and apparatus for scanning a specimen using an optical imagi...
Patent number
7,247,825
Issue date
Jul 24, 2007
Vistec Semiconductor Systems GmbH
Dirk Sönksen
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
Wafer inspection device
Publication number
20070040241
Publication date
Feb 22, 2007
Michael Halama
G01 - MEASURING TESTING
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Patent Application
Method and apparatus for scanning a specimen using an optical imagi...
Publication number
20040129859
Publication date
Jul 8, 2004
Leica Microsystems Semiconductor GmbH
Dirk Sonksen
G02 - OPTICS