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Guenther O. Langner
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Westford, MA, US
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last 30 patents
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Patent Grant
Electron beam source employing a photo-emitter cathode
Patent number
4,820,927
Issue date
Apr 11, 1989
Control Data Corporation
Guenther O. Langner
B82 - NANO-TECHNOLOGY
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Patent Grant
All electrostatic electron optical sub-system for variable electron...
Patent number
4,683,366
Issue date
Jul 28, 1987
Control Data Corporation
Kenneth J. Harte
B82 - NANO-TECHNOLOGY
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Patent Grant
Method for measurement of spotsize and edgewidth in electron beam l...
Patent number
4,675,528
Issue date
Jun 23, 1987
Control Data Corporation
Guenther O. Langner
G01 - MEASURING TESTING