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Spiegelberg, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing an optical component
Patent number
7,581,305
Issue date
Sep 1, 2009
Carl Zeiss SMT AG
Bernhard Geuppert
B24 - GRINDING POLISHING
Information
Patent Grant
8-mirror microlithography projection objective
Patent number
7,508,580
Issue date
Mar 24, 2009
Carl Zeiss SMT AG
Hans-Juergen Mann
G02 - OPTICS
Information
Patent Grant
Mirror for use in a projection exposure apparatus
Patent number
7,481,543
Issue date
Jan 27, 2009
Carl Zeiss SMT AG
Udo Dinger
B24 - GRINDING POLISHING
Information
Patent Grant
8-mirror microlithography projection objective
Patent number
7,372,624
Issue date
May 13, 2008
Carl Zeiss SMT AG
Hans-Juergen Mann
G02 - OPTICS
Information
Patent Grant
Method for the interferometric measurement of non-rotationally symm...
Patent number
7,277,186
Issue date
Oct 2, 2007
Carl Zeiss SMT AG
Guenther Seitz
G01 - MEASURING TESTING
Information
Patent Grant
Method of manufacturing an optical element
Patent number
7,118,449
Issue date
Oct 10, 2006
Carl Zeiss SMT AG
Udo Dinger
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Method for measuring and manufacturing an optical element and optic...
Publication number
20050225774
Publication date
Oct 13, 2005
Carl Zeiss SMT AG
Rolf Freimann
G02 - OPTICS
Information
Patent Application
Method of manufacturing an optical component and optical system usi...
Publication number
20050223539
Publication date
Oct 13, 2005
Carl Zeiss SMT AG
Bernhard Geuppert
B24 - GRINDING POLISHING
Information
Patent Application
Method for the interferometric measurement of non-rotationally symm...
Publication number
20050046867
Publication date
Mar 3, 2005
Carl Zeiss SMT AG
Guenther Seitz
G01 - MEASURING TESTING