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Guey-Shyung Cho
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Hsin-Chu, TW
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last 30 patents
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Patent Grant
Apparatus and method for positioning gas injectors in a vertical fu...
Patent number
6,435,865
Issue date
Aug 20, 2002
Taiwan Semiconductor Manufacturing Co., Ltd
Heng-Yi Tseng
C30 - CRYSTAL GROWTH
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Patent Grant
Semiconductor wafer transport pod having cover latch indicator
Patent number
6,340,933
Issue date
Jan 22, 2002
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Jen Chen
G08 - SIGNALLING
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Patent Grant
Apparatus for guiding the removal of a processing tube from a semic...
Patent number
6,168,427
Issue date
Jan 2, 2001
Taiwan Semiconductor Manufacturing Co., Ltd
Guey-Shyung Cho
C30 - CRYSTAL GROWTH