Guido Hergenhan

Person

Jena, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for integrally bonding a glass element to a support element,...
- Patent number 12,338,183
- Issue date Jun 24, 2025
- Jenoptik Optical Systems GmbH
- Guido Hergenhan
- G01 - MEASURING TESTING
Information Patent Grant
Arrangement for the continuous generation of liquid tin as emitter...
- Patent number 8,154,000
- Issue date Apr 10, 2012
- XTREME technologies GmbH
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement for generating extreme ultraviolet radiation by means o...
- Patent number 8,008,595
- Issue date Aug 30, 2011
- Xtreme technologies GmbH
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement and method for the generation of extreme ultraviolet ra...
- Patent number 7,812,542
- Issue date Oct 12, 2010
- XTREME Technologies GmbH
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement for radiation generation by means of a gas discharge
- Patent number 7,800,086
- Issue date Sep 21, 2010
- XTREME Technologies GmbH
- Christian Ziener
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement for the generation of extreme ultraviolet radiation by...
- Patent number 7,649,187
- Issue date Jan 19, 2010
- Xtreme technologies GmbH
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement and method for the generation of extreme ultraviolet ra...
- Patent number 7,531,820
- Issue date May 12, 2009
- Xtreme technologies GmbH
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement for generating extreme ultraviolet radiation based on a...
- Patent number 7,477,673
- Issue date Jan 13, 2009
- Xtreme technologies GmbH
- Christian Ziener
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement for providing target material for the generation of sho...
- Patent number 7,405,413
- Issue date Jul 29, 2008
- Xtreme technologies GmbH
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement for providing a reproducible target flow for the energy...
- Patent number 7,372,057
- Issue date May 13, 2008
- Xtreme technologies GmbH
- Kai Gaebel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement and method for metering target material for the generat...
- Patent number 7,368,742
- Issue date May 6, 2008
- Xtreme technologies GmbH
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for the temporally stable generation of EUV radiation by...
- Patent number 7,274,030
- Issue date Sep 25, 2007
- Xtreme technologies GmbH
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and arrangement for the plasma-based generation of intensive...
- Patent number 7,250,621
- Issue date Jul 31, 2007
- Xtreme technologies GmbH
- Kai Gaebel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation source for the generation of short-wavelength radiation
- Patent number 7,233,013
- Issue date Jun 19, 2007
- Xtreme technologies GmbH
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement for the generation of a pulsed laser beam of high avera...
- Patent number 7,218,651
- Issue date May 15, 2007
- Xtreme technologies GmbH
- Guido Hergenhan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and arrangement for the plasma-based generation of soft x-ra...
- Patent number 7,161,163
- Issue date Jan 9, 2007
- Xtreme technologies GmbH
- Kai Gaebel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement for the stabilization of the radiation emission of a pl...
- Patent number 7,122,814
- Issue date Oct 17, 2006
- Xtreme technologies GmbH
- Guido Hergenhan
- G01 - MEASURING TESTING
Information Patent Grant
Arrangement for the generation of intensive short-wave radiation ba...
- Patent number 6,995,382
- Issue date Feb 7, 2006
- Xtreme technologies GmbH
- Christian Ziener
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Positioning device
- Patent number 6,947,227
- Issue date Sep 20, 2005
- MILASYS GbR
- Guido Hergenhan
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR INTEGRALLY BONDING A GLASS ELEMENT TO A SUPPORT ELEMENT,...
- Publication number 20240343654
- Publication date Oct 17, 2024
- JENOPTIK OPTICAL SYSTEMS GMBH
- Guido HERGENHAN
- G01 - MEASURING TESTING
Information Patent Application
FILTER, METHOD OF FORMATION THEREOF, AND IMAGE SENSOR
- Publication number 20180299792
- Publication date Oct 18, 2018
- ASML NETHERLANDS B.V.
- Jelte Rients BEARDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ARRANGEMENT FOR THE CONTINUOUS GENERATION OF LIQUID TIN AS EMITTER...
- Publication number 20100282987
- Publication date Nov 11, 2010
- XTREME TECHNOLOGIES GMBH
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ARRANGEMENT AND METHOD FOR THE GENERATION OF EXTREME ULTRAVIOLET RA...
- Publication number 20080180029
- Publication date Jul 31, 2008
- XTREME technologies GmbH;
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ARRANGEMENT FOR THE GENERATION OF EXTREME ULTRAVIOLET RADIATION BY...
- Publication number 20080006783
- Publication date Jan 10, 2008
- XTREME technologies GmbH;
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ARRANGEMENT FOR GENERATING EXTREME ULTRAVIOLET RADIATION BASED ON A...
- Publication number 20070228299
- Publication date Oct 4, 2007
- XTREME technologies GmbH;
- Christian Ziener
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ARRANGEMENT AND METHOD FOR THE GENERATION OF EXTREME ULTRAVIOLET RA...
- Publication number 20070085044
- Publication date Apr 19, 2007
- XTREME technologies GmbH;
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ARRANGEMENT FOR RADIATION GENERATION BY MEANS OF A GAS DISCHARGE
- Publication number 20070040511
- Publication date Feb 22, 2007
- XTREME technologies GmbH;
- Christian ZIENER
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma radiation source
- Publication number 20060226377
- Publication date Oct 12, 2006
- XTREME technologies GmbH;
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radiation source for the generation of short-wavelength radiation
- Publication number 20060219959
- Publication date Oct 5, 2006
- XTREME technologies GmbH;
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Arrangement for the generation of a pulsed laser beam of high avera...
- Publication number 20060140232
- Publication date Jun 29, 2006
- XTREME technologies GmbH;
- Guido Hergenhan
- B82 - NANO-TECHNOLOGY
Information Patent Application
Arrangement for providing a reproducible target flow for the energy...
- Publication number 20060043319
- Publication date Mar 2, 2006
- XTREME technologies GmbH;
- Kai Gaebel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Arrangement for providing target material for the generation of sho...
- Publication number 20060024216
- Publication date Feb 2, 2006
- XTREME technologies GmbH;
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Arrangement and method for metering target material for the generat...
- Publication number 20060017026
- Publication date Jan 26, 2006
- XTREME technologies GmbH;
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Apparatus for the temporally stable generation of EUV radiation by...
- Publication number 20050274912
- Publication date Dec 15, 2005
- XTREME technologies GmbH;
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and arrangement for the plasma-based generation of intensive...
- Publication number 20050258768
- Publication date Nov 24, 2005
- XTREME technologies GmbH;
- Kai Gaebel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and arrangement for the plasma-based generation of soft x-ra...
- Publication number 20050169429
- Publication date Aug 4, 2005
- XTREME technologies GmbH;
- Kai Gaebel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Arrangement for the stabilization of the radiation emission of a pl...
- Publication number 20040195529
- Publication date Oct 7, 2004
- Guido Hergenhan
- G01 - MEASURING TESTING
Information Patent Application
Arrangement for the generation of intensive short-wave radiation ba...
- Publication number 20040159802
- Publication date Aug 19, 2004
- Christian Ziener
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Positioning device
- Publication number 20040145821
- Publication date Jul 29, 2004
- MILASYS GBR
- Guido Hergenhan
- G02 - OPTICS

Guido Hergenhan

Person

Patents Grantslast 30 patents

Method for integrally bonding a glass element to a support element,...

Arrangement for the continuous generation of liquid tin as emitter...

Arrangement for generating extreme ultraviolet radiation by means o...

Arrangement and method for the generation of extreme ultraviolet ra...

Arrangement for radiation generation by means of a gas discharge

Arrangement for the generation of extreme ultraviolet radiation by...

Arrangement and method for the generation of extreme ultraviolet ra...

Arrangement for generating extreme ultraviolet radiation based on a...

Arrangement for providing target material for the generation of sho...

Arrangement for providing a reproducible target flow for the energy...

Arrangement and method for metering target material for the generat...

Apparatus for the temporally stable generation of EUV radiation by...

Method and arrangement for the plasma-based generation of intensive...

Radiation source for the generation of short-wavelength radiation

Arrangement for the generation of a pulsed laser beam of high avera...

Method and arrangement for the plasma-based generation of soft x-ra...

Arrangement for the stabilization of the radiation emission of a pl...

Arrangement for the generation of intensive short-wave radiation ba...

Positioning device

Patents Applicationslast 30 patents

METHOD FOR INTEGRALLY BONDING A GLASS ELEMENT TO A SUPPORT ELEMENT,...

FILTER, METHOD OF FORMATION THEREOF, AND IMAGE SENSOR

ARRANGEMENT FOR THE CONTINUOUS GENERATION OF LIQUID TIN AS EMITTER...

ARRANGEMENT AND METHOD FOR THE GENERATION OF EXTREME ULTRAVIOLET RA...

ARRANGEMENT FOR THE GENERATION OF EXTREME ULTRAVIOLET RADIATION BY...

ARRANGEMENT FOR GENERATING EXTREME ULTRAVIOLET RADIATION BASED ON A...

ARRANGEMENT AND METHOD FOR THE GENERATION OF EXTREME ULTRAVIOLET RA...

ARRANGEMENT FOR RADIATION GENERATION BY MEANS OF A GAS DISCHARGE

Plasma radiation source

Radiation source for the generation of short-wavelength radiation

Arrangement for the generation of a pulsed laser beam of high avera...

Arrangement for providing a reproducible target flow for the energy...

Arrangement for providing target material for the generation of sho...

Arrangement and method for metering target material for the generat...

Apparatus for the temporally stable generation of EUV radiation by...

Method and arrangement for the plasma-based generation of intensive...

Method and arrangement for the plasma-based generation of soft x-ra...

Arrangement for the stabilization of the radiation emission of a pl...

Arrangement for the generation of intensive short-wave radiation ba...

Positioning device