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Guido Probst
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Bautzen, DE
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last 30 patents
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Patent Grant
Titanium silicon nitride deposition
Patent number
7,833,906
Issue date
Nov 16, 2010
ASM International N.V.
Martin A. Knapp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
TITANIUM SILICON NITRIDE DEPOSITION
Publication number
20100151681
Publication date
Jun 17, 2010
ASM INTERNATIONAL N.V.
Martin A. Knapp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...