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Guido Schriever
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Aachen, DE
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Method and device for producing extreme ultraviolet and soft X-rays...
Patent number
6,389,106
Issue date
May 14, 2002
Fraunhoger-Gesellschaft zur Förderung der angewandten Forschung e.V.
Willi Neff
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY