Guizhen Yan

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Beijing, CN

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Patents Grantslast 30 patents

Information Patent Grant
Method for fabricating high aspect ratio MEMS device with integrate...
- Patent number 7,618,837
- Issue date Nov 17, 2009
- Peking University
- Guizhen Yan
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Method for fabricating high aspect ratio MEMS device with integrate...
- Publication number 20050287760
- Publication date Dec 29, 2005
- Peking University
- Guizhen Yan
- B81 - MICRO-STRUCTURAL TECHNOLOGY