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Guk-Kwang Kim
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Suwon-shi, KR
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Patents Grants
last 30 patents
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Patent Grant
Metal gasket for a semiconductor fabrication chamber
Patent number
6,833,621
Issue date
Dec 21, 2004
Samsung Electronics Co., Ltd.
Tae-Won Lee
F05 - INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF...
Patents Applications
last 30 patents
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Patent Application
Metal gasket for a semiconductor fabrication chamber
Publication number
20030122326
Publication date
Jul 3, 2003
SAMSUNG ELECTRONICS CO., LTD.
Tae-Won Lee
F05 - INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF...