Membership
Tour
Register
Log in
Gunsu Yun
Follow
Person
Fremont, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Methods for controlling time scale of gas delivery into a processin...
Patent number
8,340,827
Issue date
Dec 25, 2012
Lam Research Corporation
Gunsu Yun
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
METHODS FOR CONTROLLING TIME SCALE OF GAS DELIVERY INTO A PROCESSIN...
Publication number
20090319071
Publication date
Dec 24, 2009
Gunsu Yun
G05 - CONTROLLING REGULATING