Gunter METTIN

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 9,090,854
- Issue date Jul 28, 2015
- Lam Research AG
- Stephan Hoffmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20130098391
- Publication date Apr 25, 2013
- LAM RESEARCH AG
- Stephan HOFFMANN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20130098392
- Publication date Apr 25, 2013
- LAM RESEARCH AG
- Stephan HOFFMANN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...