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Gunther Guggenberger
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Spittal an der Drau, AT
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Patent Grant
Process and device for one-sided treatment of disk-shaped objects
Patent number
6,149,759
Issue date
Nov 21, 2000
SEZ Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung AG
Gunther Guggenberger
H01 - BASIC ELECTRIC ELEMENTS