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Gunther Obermeier
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Palling, DE
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last 30 patents
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Patent Grant
Method for the production of an epitaxially grown semiconductor wafer
Patent number
6,630,024
Issue date
Oct 7, 2003
Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
Rüdiger Schmolke
C30 - CRYSTAL GROWTH
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last 30 patents
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Patent Application
Method for the production of an epitaxially grown semiconductor wafer
Publication number
20020022351
Publication date
Feb 21, 2002
Rudiger Schmolke
C30 - CRYSTAL GROWTH