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Singapore, SG
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last 30 patents
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Patent Grant
Method for etching a silicided poly using fluorine-based reactive i...
Patent number
6,689,698
Issue date
Feb 10, 2004
Chartered Semiconductor Manufacturing Limited
Song Zhigang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method for etching a silicided poly using fluorine-based reactive i...
Publication number
20030092276
Publication date
May 15, 2003
CHARTERED SEMICONDUCTORS MANUFACTURED LIMITED
Song Zhigang
H01 - BASIC ELECTRIC ELEMENTS