Guodong CHEN

Follow

Person

Beijing, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Control method of radiofrequency source
- Patent number 11,615,942
- Issue date Mar 28, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yahui Huang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR REACTION CHAMBER AND ATOMIC LAYER PLASMA ETCHING APPA...
- Publication number 20230187173
- Publication date Jun 15, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xingfei MAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL METHOD OF RADIOFREQUENCY SOURCE
- Publication number 20210398776
- Publication date Dec 23, 2021
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yahui HUANG
- H01 - BASIC ELECTRIC ELEMENTS