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Guofu J. Feng
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of depositing amorphous silicon based films having controlle...
Patent number
6,352,910
Issue date
Mar 5, 2002
Applied Komatsu Technology, Inc.
William R. Harshbarger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition of high quality conformal silicon oxide thin films on gl...
Patent number
5,861,197
Issue date
Jan 19, 1999
Applied Materials, Inc.
Kam Law
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Single chamber CVD process for thin film transistors
Patent number
5,589,233
Issue date
Dec 31, 1996
Applied Materials, Inc.
Kam Law
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-step chemical vapor deposition method for thin film transistors
Patent number
5,567,476
Issue date
Oct 22, 1996
Applied Komatsu Technology, Inc.
Kam S. Law
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-step chemical vapor deposition method for thin film transistors
Patent number
5,441,768
Issue date
Aug 15, 1995
Applied Materials, Inc.
Kam S. Law
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method of depositing amorphous silicon based films having controlle...
Publication number
20020115269
Publication date
Aug 22, 2002
APPLIED MATERIALS, INC.
William R. Harshbarger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...