Guogan Liu

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Shanghai, CN

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Patents Applicationslast 30 patents

Information Patent Application
SHUTTER BLADE DEVICE FOR LITHOGRAPHY MACHINE
- Publication number 20200124939
- Publication date Apr 23, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yanfei WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SIDE VERTICAL MIRROR GROUP AND INSTALLATION METHOD THEREOF
- Publication number 20190154948
- Publication date May 23, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Mingtian WANG
- G02 - OPTICS
Information Patent Application
LARGE FIELD PROJECTION OBJECTIVE FOR LITHOGRAPHY
- Publication number 20130293859
- Publication date Nov 7, 2013
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Heng Wu
- G02 - OPTICS